Zobrazeno 1 - 2
of 2
pro vyhledávání: '"古震維"'
Autor:
Chen-Wei Ku, 古震維
98
The issue of contamination control plays an important role in semiconductor manufacturing processes. This study evaluated the influences of micro-comtamination control on the transportation and purging performance in 450mm and 300mm-wafer fro
The issue of contamination control plays an important role in semiconductor manufacturing processes. This study evaluated the influences of micro-comtamination control on the transportation and purging performance in 450mm and 300mm-wafer fro
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/tc2278
Autor:
Chen-Wei Ku, 古震維
93
A theoretical investigation of aerosol particle responding to laminar flow, and the deposition rate of the particles onto a wafer, is proposed. The flow is models as a two-dimensional, incompressible and laminar flow. The transport mechanisms
A theoretical investigation of aerosol particle responding to laminar flow, and the deposition rate of the particles onto a wafer, is proposed. The flow is models as a two-dimensional, incompressible and laminar flow. The transport mechanisms
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/6s22cc