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pro vyhledávání: '"劉林益"'
Autor:
Lin-Yi Liu, 劉林益
102
Most nanostructures are fabricated using electron beam (E-Beam), reactive ion etching (RIE) with high-energy beam direct write lithography to achieve the production of sub-micron structures. The high cost and long processing time prevent the
Most nanostructures are fabricated using electron beam (E-Beam), reactive ion etching (RIE) with high-energy beam direct write lithography to achieve the production of sub-micron structures. The high cost and long processing time prevent the
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/39654596070529270621