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pro vyhledávání: '"劉侑宗"'
Autor:
Yu-chung Liu, 劉侑宗
92
We have successfully used SiH4 as main raw material to deposit semitransparent film that the main composition of the film is silicon oxynitride. And, it has light absorption (absorption coefficient from 0 to 20000 cm-1) that can be applied as
We have successfully used SiH4 as main raw material to deposit semitransparent film that the main composition of the film is silicon oxynitride. And, it has light absorption (absorption coefficient from 0 to 20000 cm-1) that can be applied as
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/93734649617124320973
