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pro vyhledávání: '"刘俞辰"'
Publikováno v:
Systems Engineering & Electronics; Jun2024, Vol. 46 Issue 6, p1925-1934, 10p
Autor:
Yu-Chen Liou, 劉俞辰
106
Titanium oxynitrides (TiNxOy) with tunable properties between TiN and TiO2 could be manipulated by tailored N/O ratio. Therefore, they have been used for diversified applications. In this studty, TiNxOy thin films were produced by unbalanced
Titanium oxynitrides (TiNxOy) with tunable properties between TiN and TiO2 could be manipulated by tailored N/O ratio. Therefore, they have been used for diversified applications. In this studty, TiNxOy thin films were produced by unbalanced
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/697qt5
