Zobrazeno 1 - 5
of 5
pro vyhledávání: '"倪明阳 Ni Ming-yang"'
Publikováno v:
Optics and Precision Engineering. 24:143-151
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4cd2d68333b3052c454bddfe93e8112c
https://doi.org/10.3788/ope.20162401.0143
https://doi.org/10.3788/ope.20162401.0143
Autor:
张巍 Zhang Wei, 彭海峰 Peng Hai-feng, 倪明阳 Ni Ming-yang, 王学亮 Wang Xue-liang, 于新峰 Yu Xin-feng, 周连生 Zhou Liansheng
Publikováno v:
Optics and Precision Engineering. 23:3033-3040
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c2d99b775db424440bbe6db12d890c73
https://doi.org/10.3788/ope.20152311.3033
https://doi.org/10.3788/ope.20152311.3033
Publikováno v:
Optics and Precision Engineering. 21:2000-2007
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::eb41b5aab0477389f1bc72ec51200b1a
https://doi.org/10.3788/ope.20132108.2000
https://doi.org/10.3788/ope.20132108.2000
Autor:
巩岩 Gong Yan, 倪明阳 Ni Ming-yang
Publikováno v:
Chinese Journal of Optics and Applied Optics. 5:476-484
In order to maintain the dynamic stability of a Deep Ultra-Violet(DUV) lithographic projection objective,a kinematic supporting structure which is able to eliminate the effects of temperature change and external strain is designed.The lens surface de
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4999e2c7c1f0c31f6eade5fd3fd7d59d
https://doi.org/10.3788/co.20120505.0476
https://doi.org/10.3788/co.20120505.0476
Autor:
倪明阳 Ni Ming-yang, 赵磊 Zhao Lei, 王学亮 Wang Xue-liang, 张巍 Zhang Wei, 袁文全 Yuan Wen-quan, 巩岩 Gong Yan
Publikováno v:
ACTA PHOTONICA SINICA. 40:1526-1530
Geometrical nonlinearity of a fine objective lens′ bellows actuator was analyzed with finite element method,and characteristics of bellows actuator were evaluated by linearity.Geometric nonlinear deformations of some common bellows(U shape,S shape,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6251c05c71af24b3f1d3787ba78edf15
https://doi.org/10.3788/gzxb20114010.1526
https://doi.org/10.3788/gzxb20114010.1526