Zobrazeno 1 - 1
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pro vyhledávání: '"структура sinx/al"'
Autor:
G. A. Rudakov, R. Z. Khafizov
Publikováno v:
Известия высших учебных заведений России: Радиоэлектроника, Vol 0, Iss 4, Pp 47-56 (2018)
Mechanical properties of MEMS devices are specified by their structure and process parameters, such as temperature, films thickness, deposition conditions, etc. These features, in particular, the deposition temperature and post deposition treatments,
Externí odkaz:
https://doaj.org/article/4d6d8d412a884268b5e7022804deeab4