Zobrazeno 1 - 1
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pro vyhledávání: '"подложка анодного al2o3"'
Autor:
G. V. Litvinovich, D. L. Shimanovich
Publikováno v:
Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki, Vol 0, Iss 3, Pp 39-44 (2019)
Results of the interconnection system formation during substrate anode alumina processing are presented. It is proved that anode Al2O3 substrate, interconnection system in the bulk and contact pads formation is possible simultaneously. The thickness
Externí odkaz:
https://doaj.org/article/24be0ac5ab254c17a09caae9e9ae432c
