Zobrazeno 1 - 1
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pro vyhledávání: '"í. Bourhis"'
Autor:
Christian Ulysse, í. Bourhis, Loïc Auvray, Jacques Gierak, Jean-Christophe Galas, Xavier Lafosse, Gilles Patriarche, G. Oukhaled, Ali Madouri, Yong Chen, Anne-Laure Biance
Publikováno v:
Microelectronic Engineering. 83:1474-1477
High resolution FIB offers nowadays the capability to sculpt matter at the nanometer scale. Using FIB to engrave membranes opens new emerging routes for nanoscience tooling. We propose here a way to fabricate tensile SiC membranes (with thicknesses a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0e3cee87551bb6a9832270081ca5944c
https://doi.org/10.1016/j.mee.2006.01.133
https://doi.org/10.1016/j.mee.2006.01.133
