Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Özlem Şardan Sukas"'
Wet etching of platinum (Pt) electrodes for piezoelectric transducers using a thick photoresist mask
Publikováno v:
Micro and Nano Engineering, Vol 16, Iss , Pp 100153- (2022)
Platinum (Pt) is widely used in MEMS applications due to its inert nature and high temperature stability. In general, Pt is patterned using dry etching methods which require expensive machinery. In this study, we propose wet etching of Pt electrodes
Externí odkaz:
https://doaj.org/article/e33a990eb94e460b83a7bb25086742de
Autor:
Bedirhan İlik, Aziz Koyuncuoğlu, Hasan Uluşan, Salar Chamanian, Dilek Işık, Özlem Şardan-Sukas, Haluk Külah
Publikováno v:
Proceedings, Vol 1, Iss 4, p 366 (2017)
This paper presents design and fabrication of a MEMS-based thin film piezoelectric transducer to be placed on an eardrum for fully-implantable cochlear implant (FICI) applications. Resonating at a specific frequency within the hearing band, the trans
Externí odkaz:
https://doaj.org/article/6db188ca5376491ba69f1dc5db63039e