Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Österlund, Elmeri"'
Autor:
Österlund, Elmeri, Suihkonen, Sami, Ross, Glenn, Torkkeli, Altti, Kuisma, Heikki, Paulasto-Kröckel, Mervi
Publikováno v:
In Journal of Crystal Growth 1 February 2020 531
Publikováno v:
In Journal of Alloys and Compounds 25 January 2019 772:306-313
Autor:
Bespalova, Kristina, österlund, Elmeri, Ross, Glenn, Paulasto-Kröckel, Mervi, Sebastian, Abhilash Thanniyil, Karuthedath, Cyril Baby, Mertin, Stefan, Pensala, Tuomas
Publikováno v:
Bespalova, K, Österlund, E, Ross, G, Paulasto-Kröckel, M, Thanniyil Sebastian, A, Karuthedath, C, Mertin, S & Pensala, T 2021, ' Characterization of AlScN-based multilayer systems for piezoelectric micromachined ultrasound transducer (pMUT) fabrication ', Journal of Microelectromechanical Systems, vol. 30, no. 2, pp. 290-298 . https://doi.org/10.1109/JMEMS.2021.3056928
Scandium-alloyed aluminum nitride (AlScN) is a potential material for micro-electromechanical systems because of its unique advantages, such as strong piezoelectric effect and high thermal stability. However, issues related to its stability and inter
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::f8a9c0b16e69cd8446277df689566fef
https://cris.vtt.fi/en/publications/3568dd70-9609-4899-bbf9-4a0605b581a5
https://cris.vtt.fi/en/publications/3568dd70-9609-4899-bbf9-4a0605b581a5
Autor:
Österlund, Elmeri, Ross, Glenn, Caro, Miguel A., Paulasto-Kröckel, Mervi, Hollmann, Andreas, Klaus, Manuela, Meixner, Matthias, Genzel, Christoph, Koppinen, Panu, Pensala, Tuomas, Žukauskaitė, Agnė, Trebala, Michal
Publikováno v:
Österlund, E, Ross, G, Caro, M A, Paulasto-Kröckel, M, Hollmann, A, Klaus, M, Meixner, M, Genzel, C, Koppinen, P, Pensala, T, Žukauskaitė, A & Trebala, M 2021, ' Stability and residual stresses of sputtered wurtzite AlScN thin films ', Physical Review Materials, vol. 5, no. 3, 035001 . https://doi.org/10.1103/PhysRevMaterials.5.035001
Funding Information: E. Österlund appreciates the funding from the European Space Agency (NPI Grant No. 4000116390) and Aalto ELEC Doctoral School. Dr. Žukauskaitė appreciates the funding from FhG Internal Programs under Grant No. Attract 005-6006
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::99d771c0605d473e022e0dcf7e10f3f1
http://www.helmholtz-berlin.de/pubbin/oai_publication?VT=1&ID=105188
http://www.helmholtz-berlin.de/pubbin/oai_publication?VT=1&ID=105188
Akademický článek
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Autor:
Aalto, Timo, Airaksinen, Veli-Matti, Albert, Stephan Gerhard, Allegato, Giorgio, Amiotti, Marco, Anttila, Olli, Auersperg, Juergen, Bonucci, Antonio, Bose, Indranil Ronnie, Braun, Tanja, Broas, Mikael, Burggraf, J., Cameron, Christopher, Candler, Rob N., Cao, Zhen, Cardoso, André, Chen, Kuo-Shen, Conte, Andrea, Cozma, Adriana, Davis, Cristina E., Dempwolf, Sophia, Dixit, Pradeep, Dost, Michael, Dragoi, Viorel, Eränen, Simo, Fain, Bruno, Figeys, B., Fischer, Andreas C., Flötgen, Christoph, Franssila, Sami, Friedberger, Alois, Fueldner, Marc, Ganchenkova, Maria, Gonzalez, Pilar, Gosálvez, Miguel A., Grimes, Michael, Haapalinna, Atte, Hagelin, Paul, Hammond, Paul, Henttinen, Kimmo, Henttonen, Vesa, Horsley, David, Hoshi, Takeo, Itoh, Satoshi, Jakobsen, Henrik, Jansen, R., Jonsson, Kerstin, Kähler, Dirk, Kannojia, Harindra Kumar, Kattelus, Hannu, Kissinger, Gudrun, Knechtel, Roy, Knese, Kathrin, Kolari, Kai, Koskenvuori, Mika, Kuisma, Heikki, Kulkarni, Amit, Laermer, Franz, Landesberger, Christof, Leinenbach, Christina, LeVasseur, Michael K., Li, Jue, Lin, Yuyuan, Lindner, Paul F., Lodewijks, K., Lofink, Fabian, Longoni, Giorgio, Luber, Sebastian Markus, Mahmud-ul-hasan, M., Mäkinen, Jari, Mäntysalo, Matti, Martin, Devin, Maspero, Federico, Mattila, Toni T., Mauri, Luca, Merz, Peter, Meyer, Doug, Moraja, Marco, Motooka, Teruaki, Müller, Gerhard, Muralt, Paul, Nieminen, Risto M., Niklaus, Frank, Oggioni, Laura, Olkkonen, Juuso, Österlund, Elmeri, Ou, Kuang-Shun, Paloheimo, Jari, Pasanen, Toni P., Paulasto-Kröckel, Mervi, Plach, Thomas, Polizzi, Jean-Philippe, Pressel, Klaus, Putkonen, Matti, Puurunen, Riikka L., Reinert, Wolfgang, Rizzi, Enea, Rochus, V., Ross, Glenn, Rottenberg, X., Sainiemi, Lauri, Savin, Hele, Schenk, Harald, Schikowski, Marc, Schulze, Matthias, Seema, S., Severi, S., Skogström, Lasse, Suga, Tadatomo, Sullivan, Scott, Suni, Tommi, Theuss, Horst, Tilli, Markku, Tilmans, H.A.C., Tittonen, Ilkka, Tofteberg, Hannah, Törmä, Pekka, Tuomikoski, Santeri, Tyholdt, Frode, Uda, Tsuyoshi, Vallin, Örjan, Valzasina, Carlo, Veijola, Timo, Viinikka, Eeva, Vogel, Dietmar, Vogl, Andreas, Vuorinen, Vesa, Westervelde, W.J., Wicht, Sebastian, Wieland, Robert, Winkler, Bernhard, Yobas, Levent, Zanotti, Luca, Zubel, I.
Publikováno v:
In Handbook of Silicon Based MEMS Materials and Technologies Edition: Third Edition. 2020:xv-xvii
Akademický článek
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