Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Hiroki Yonezawa"'
Publikováno v:
Journal of Radioanalytical and Nuclear Chemistry Articles. 185:83-90
A simplified method for the substoichiometric analysis of phosphorus has been developed and applied to determine the concentration distribution of phosphorus in the region of a SiO2−Si interface in order to explain why phosphorus is lost from the i
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 88:207-210
Backscattering cross sections of alpha particles from carbon, oxygen and silicon were studied for beam energies between 5.5 and 8 MeV. The cross sections were used to measure the carbon and oxygen content of thin films fabricated on silicon. The elas
Publikováno v:
Journal of Radioanalytical and Nuclear Chemistry Articles. 173:409-417
The charged particle activation analysis of ultra-trace carbon in boron-doped silicon with the12C(d,n)13N reaction has been developed. In order to apply13N substoichiometric separation to determine carbon in silicon, we studied the rapid dissolution