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pro vyhledávání: '"Abdelrahman EA"'
Autor:
Kapil eDebnath, Hideo eArimoto, Muhammad K. Husain, Alyssa ePrasmusinto, Abdelrahman eAl-Attili, Rafidah ePetra, Harold M H Chong, Graham Trevor Reed, Shinichi eSaito
Publikováno v:
Frontiers in Materials, Vol 3 (2016)
We report low-loss silicon waveguides and efficient grating coupler to couple light into them. By using anisotropic wet etching technique, we reduced the side wall roughness down to 1.2nm. The waveguides were patterned along the [112] direction on a
Externí odkaz:
https://doaj.org/article/a5b0e00a044a43f780c8dd75993a8a5a