Zobrazeno 1 - 5
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pro vyhledávání: '"I. D. Calder"'
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. :342-347
Studies have been made of shallow (∼150A) As + implanted silicon, with impurity concentrations that exceed the solid solubility limit. Under CW argon laser annealing conditions we have shown that the arsenic remains in the sample even if the surfac
Autor:
R. Sue, I. D. Calder
Publikováno v:
Journal of Applied Physics. 53:7545-7550
Careful computer modeling can accurately represent the temperature distribution created during laser annealing. In this way a better understanding of the physical processes that contribute to thin film crystallization is achieved, and precise predict
Publikováno v:
Review of Scientific Instruments. 52:1509-1516
We present the design of a versatile rf heterodyne spectrometer covering a 100 kHz to 190 MHz frequency range, which has been useful in nuclear magnetic resonance and acoustic experiments over its whole range. Commercial instruments were used whereve
Publikováno v:
Journal of The Electrochemical Society. 133:592-596
Publikováno v:
Ion Implantation: Equipment and Techniques ISBN: 9783642691584
The interest in smaller geometries of semiconductor devices has led to an increased need for reliable measurements of shallow implant profiles, both as-implanted and after annealing. The most sensitive and commonly used technique, Secondary Ion Mass
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::12b6f9dba49b2794166416acf5e4989e
https://doi.org/10.1007/978-3-642-69156-0_63
https://doi.org/10.1007/978-3-642-69156-0_63