Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Pengzhan Li"'
Autor:
Yeongkwang Cho, Pengzhan Liu, Sanghuck Jeon, Jungryul Lee, Sunghoon Bae, Seokjun Hong, Young Hwan Kim, Taesung Kim
Publikováno v:
Applied Sciences, Vol 12, Iss 9, p 4339 (2022)
Slurry flow on the pad surface and its effects on oxide chemical mechanical polishing (CMP) performance were investigated in simulations and experiments. A concentric groove pad and the same pad with radial grooves were used to quantitatively compare
Externí odkaz:
https://doaj.org/article/62675f11ee2d4c269fdb12f54d496d4e
Autor:
Seungjae Lee, Dongbin Kim, Yujin Cho, Eunmi Kim, Pengzhan Liu, Dong-Bin Kwak, Seungho Keum, Hongkang Lim, Taesung Kim
Publikováno v:
Applied Sciences, Vol 11, Iss 16, p 7680 (2021)
The purpose of this study was to determine the feasibility of using an electrical low pressure impactor (ELPI) for analyzing residual particles in a Si epitaxial growth process chamber and establish an application technique. Prior to experimental mea
Externí odkaz:
https://doaj.org/article/5f353aafa1414cb2a5707c06507d65b8
Publikováno v:
Applied Sciences, Vol 8, Iss 3, p 464 (2018)
The contradiction between self-weight and load capacity of a power-assisted upper-limb exoskeleton for material hanging is unresolved. In this paper, a non-anthropomorphic 3-degree of freedom (DOF) upper-limb exoskeleton with an internally rotated el
Externí odkaz:
https://doaj.org/article/bc2735a7c6b6499db38e8831e39dc8b7