Zobrazeno 1 - 10
of 19
pro vyhledávání: '"Dongyoung Lee"'
Autor:
Moran Zaberchik, Scott Beatty, Sanghuck Jeon, Nir BenDavid, Chanha Park, Sang Ho Lee, Dongsub Choi, Dongyoung Lee, Telly Koffas, Chen Li, Ramkumar Karur-Shanmugam, Dongsoo Kim, Honggoo Lee, Jae Young Park, Hedvi Spielberg, Efi Megged, Dohwa Lee
Publikováno v:
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV.
We developed a statistical method that can be applied to overlay metrology tools to improve performance and time-to-results (TTR) of multi-cycle optimization based on the brute force method. First, we evaluated full response surfaces for each combina
Autor:
Seung-Uk Jeong, Sotirios Tsiachris, Jeongwoo Jae, Dongyoung Lee, Chih-Hung Hsieh, Gwang-Gon Kim, Yuna Park, Ji-Hoon Jung, Kyoyeon Cho, Abdalmohsen Elmalk, Chanha Park, Nang-Lyeom Oh, Taekwon Jee, Gratiela Isai, Jungchan Kim, JaeYoung Park, Won-Kwang Ma, Ewa Kasperkiewicz, Rizvi Rahman, Anita Bouma, Sang Ho Lee, WeiTai Lin, Kuo-Feng Pao, Jae-Doug Yoo, Jonggeun Won, Sudharshanan Raghunathan, Hsin-Yu Chen, Kuan-Ming Chen, Sang-Woo Kim, Wolfgang Henke
Publikováno v:
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV.
In this paper, budget characterization and wafer mapping of the Edge Placement Error (EPE) is studied to manage and improve pattern defects with a use case selected from SK Hynix’s most advanced DRAM 1x nm product. To quantify EPE, CD and overlay w
Autor:
Chanha Park, Xiaolei Liu, Dongyoung Lee, Chen Dror, Eltsafon Ashwal, Dongsoo Kim, Sanghuck Jeon, Zephyr Liu, Katya Gordon, Honggoo Lee, Eitan Hajaj, Mark Ghinovker, Diana Shaphirov, Sang-Ho Lee, Dongsub Choi, Dohwa Lee, Raviv Yohanan
Publikováno v:
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV.
Reduction in on product overlay (OPO) is a key component for high-end, high yield integrated circuit manufacturing. Due to the continually shrinking dimensions of the IC device elements it has become near-impossible to measure overlay on the device i
Publikováno v:
Applied Sciences
Volume 10
Issue 19
Applied Sciences, Vol 10, Iss 6852, p 6852 (2020)
Volume 10
Issue 19
Applied Sciences, Vol 10, Iss 6852, p 6852 (2020)
In this study, a novel method for designing real-time motion profiles based on a weighted fuzzy logic algorithm for an exoskeleton robot was proposed. When developing exoskeleton robots, it is important that they can identify a wearer&rsquo
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Autor:
Anna Golotsvan, Efi Megged, Roie Volkivich, Dohwa Lee, Dongsub Choi, Jaesun Woo, Sanghuck Jeon, Jin-Soo Kim, Seongjae Lee, Dongyoung Lee, Honggoo Lee, Chunsoo Kang, Chanha Park, Shlomit Katz
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXXIV.
As the semiconductor industry rapidly approaches the 3nm lithography node, on product overlay (OPO) requirements have become tighter and as a result, residuals magnitude requirements have become even more challenging. Metrology performance enhancemen
Publikováno v:
Sensors (Basel, Switzerland)
Sensors, Vol 20, Iss 1, p 211 (2019)
Sensors
Volume 20
Issue 1
Sensors, Vol 20, Iss 1, p 211 (2019)
Sensors
Volume 20
Issue 1
An exoskeleton robot helps the wearer with mechanical forces by identifying the wearer&rsquo
s intentions and requires high energy efficiency, sufficient load capacity, and a comfortable fit. However, since it is difficult to implement complex a
s intentions and requires high energy efficiency, sufficient load capacity, and a comfortable fit. However, since it is difficult to implement complex a
Publikováno v:
Applied Sciences
Volume 9
Issue 20
Applied Sciences, Vol 9, Iss 20, p 4295 (2019)
Volume 9
Issue 20
Applied Sciences, Vol 9, Iss 20, p 4295 (2019)
Exoskeleton robots have been developed in various fields and are divided into electric and hydraulic exoskeletons according to the actuator type. In the case of hydraulic robots, because a unidirectional pump is applied, there are limitations to the
Publikováno v:
Processes, Vol 7, Iss 6, p 389 (2019)
Processes
Volume 7
Issue 6
Processes
Volume 7
Issue 6
In the development of a wearable robot, compact volume size, high energy efficiency, and a high load capacity linear actuator system are necessary. However, conventional hydraulic actuator systems are difficult to apply to wearable robots. Also, they
Publikováno v:
RoboSoft
Drag-based swimming is usually accompanied with the shape change of rowing appendages to generate asymmetric force during the power stroke and recovery stroke. To implement this in an aquatic robot, one may actively control the surface area of its le
Autor:
Jun-Yeob Kim, Dongyoung Lee, Sangjun Han, Aileen Soco, Nang-Lyeom Oh, Chanha Park, Tjitte Nooitgedagt, Dong-Hak Lee, Arno van Leest, Honggoo Lee, Jaap Karssenberg, Mir Shahrjerdy
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXXIII.
In next generation 3D-NAND devices, accurately determining after-etch overlay for the multi-layer stack is a major challenge. This is especially the case for the multi-tier 3D-NAND structures, where the overlay of the channel holes is an important pe