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pro vyhledávání: '"Bruce A. Smith"'
This chapter addresses general trends and examples of the evolution in advanced lithography methods beyond traditional single patterning technology. The ability to print multiple exposure passes to meet performance targets in a cost-effective manner
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::faf4a71ff60ba093fd93e20f17836ccb
https://doi.org/10.1201/9781315117171-3
https://doi.org/10.1201/9781315117171-3
Publikováno v:
International Conference on Extreme Ultraviolet Lithography 2018.
As the power of laser produced plasma sources has increased, EUV lens heating has become a major component of process variation. Differential lens heating can cause thermal aberrations which affect system drift during operation, therefore pupil plane
Publikováno v:
Journal of Phonetics. 54:98-108
One fundamental aspect of the Russian phonological system is a contrast between palatalized and unpalatalized consonants. This distinction poses a challenge for native English speakers learning Russian as a second language because palatalization is n
Autor:
Gregory LaFerla, Bruce D. Smith, David L. Klemm, Pete Tynan, Clark Wolverton, Kevin F. O’Brien
Publikováno v:
Proceedings of the Water Environment Federation. 2014:2358-2365
Publikováno v:
GEOPHYSICS. 79:E201-E216
Systematic calibration errors must be taken into account because they can substantially impact the accuracy of inverted subsurface resistivity models derived from frequency-domain electromagnetic data, resulting in potentially misleading interpretati
Publikováno v:
ASEG Extended Abstracts. 2012:1-4
SUMMARY Bayesian Markov chain Monte Carlo (MCMC) algorithms are introduced for the analysis of one- and two-dimensional airborne frequency-domain electromagnetic datasets. Substantial information about parameter uncertainty, non-uniqueness, correlati
Autor:
Erik Verduijn, Zac Levinson, Markus P. Benk, Bruce W. Smith, Antoine Wojdyla, Andrew Burbine, Pawitter Mangat, Kenneth A. Goldberg, Obert Wood
Publikováno v:
Extreme Ultraviolet (EUV) Lithography VII.
We present an approach to image-based pupil plane amplitude and phase characterization using models built with principal component analysis (PCA). PCA is a statistical technique to identify the directions of highest variation (principal components) i
Publikováno v:
SPIE Proceedings.
The use of optical proximity correction (OPC) demands increasingly accurate models of the photolithographic process. Model building and inference techniques in the data science community have seen great strides in the past two decades which make bett
Autor:
Bruce L. Smith, Rachel Hayes-Harb
Publikováno v:
Journal of Phonetics. 39:115-120
In two previous papers published in Journal of Phonetics, we presented findings concerning perception and production of devoicing by native speakers of Mandarin (Hayes-Harb, Smith, Bent, & Bradlow, 2008) and native speakers of German (Smith, Hayes-Ha
Publikováno v:
Journal of Phonetics. 37:257-275
German manifests a phonological pattern of word-final consonant devoicing, with an underlying voicing contrast that is largely ‘‘neutralized’’ in speech, whereas English has a surface voicing contrast in final position. This raises questions