Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Sung-Hoon Bae"'
Autor:
Seokjun Hong, Pengzhan Liu, Cheng Tang, Chulwoo Bae, Taesung Kim, Sung-Hoon Bae, Jungryul Lee, Hyeonmin Seo
Publikováno v:
Precision Engineering. 73:195-202
With the demand for manufacturing large (e.g., 450 mm) wafers, problems arise due to temperature increases associated with the chemical mechanical polishing (CMP) process. Various methods have been employed to stabilize the in-situ polishing temperat
Publikováno v:
Surface and Coatings Technology. 205:S152-S157
Tribological characteristics of several ceramic coatings on anodized aluminum alloy surfaces were studied to investigate the effect of the transfer layer on the friction and wear of aluminum alloys. Dry sliding tests were performed with a pin-on-disk