Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Guillermo Sobreviela"'
Autor:
Guillermo Sobreviela, Xudong Zou, Milind Pandit, Chun Zhao, Ashwin A. Seshia, Arif Mustafazade
Publikováno v:
Journal of Microelectromechanical Systems. 30:500-505
Silicon MEMS resonators are increasingly being adopted for applications in timing and frequency control, as well as precision sensing. It is well established that a key limitation to performance is associated with sensitivity to environmental variabl
This paper reports on the experimental characterization of a vacuum packaged bulk acoustic wave disk gyroscope with T-shape anchors fabricated on a (100) single-crystal silicon substrate. Improvements in key device performance parameters are achieved
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4e6e2c6efdf73bc08f308557ef96db2b
This paper reports experimental results demonstrating excellent short-term frequency stability of 45.6 µLHz (36 ppt@0.4 s integration time) for a bulk acoustic wave (BAW) silicon disk resonator oscillator. The n=4 radial mode of a BAW disk resonator
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d0687bb402e800eac344f43a93e2edba
Publikováno v:
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).
A disk resonator demonstrates an ultra-high-quality factor (Q ~ 107) at room temperature. When embedded in a board-level feedback oscillator an excellent short-term stability (340 ppt @ 1s integration time) is measured. The use of a new higher-order
Autor:
Gabriel Vidal-Alvarez, Nuria Barniol, Arantxa Uranga, Francesc Torres, Guillermo Sobreviela, Martin Riverola
Publikováno v:
IEEE Sensors Journal. 16:5283-5291
In this paper, we present the electrical characterization of the nonlinear tapping mode of the nanorelays capacitively transduced. Such a characterization is carried out utilizing three-terminal tungsten CMOS-NEM relays. Exciting electrostatically th