Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Pengzhan Li"'
Publikováno v:
Sensors, Vol 23, Iss 19, p 8226 (2023)
To address the challenges in real-time process diagnosis within the semiconductor manufacturing industry, this paper presents a novel machine learning approach for analyzing the time-varying 10th harmonics during the deposition of low-k oxide (SiOF)
Externí odkaz:
https://doaj.org/article/b5591127c6f2485cbaf05d77c3737d93
Publikováno v:
Sensors, Vol 23, Iss 12, p 5563 (2023)
This study identified time-varying harmonic characteristics in a high-density plasma (HDP) chemical vapor deposition (CVD) chamber by depositing low-k oxide (SiOF). The characteristics of harmonics are caused by the nonlinear Lorentz force and the no
Externí odkaz:
https://doaj.org/article/68c9a5e86b2d4bfaaa562e2eee65d86c
Autor:
Weitao Wang, Huaixu Wang, Zhongjun Wu, Tingting Duan, Pengzhan Liu, Shiyi Ou, Hani El-Nezami, Jie Zheng
Publikováno v:
Foods, Vol 12, Iss 2, p 321 (2023)
Thermally processed food always contains various types of harmful substances. Control of their levels in food is important for human health. This work used the extracts from green tea dust, old green tea, yellow tea, white tea, oolong tea, and black
Externí odkaz:
https://doaj.org/article/313934a3ed6241f8a0a4b59736940167
Publikováno v:
Materials Research Express, Vol 8, Iss 7, p 076508 (2021)
In this paper, the deformation behavior of the LPSO phase of Mg-Gd-Y-Zn-Zr and its influence on the grain size are studied during the cooling free forging deformation. Studies have shown that cooling free forging can refine different forms of LPSO ph
Externí odkaz:
https://doaj.org/article/4a8140f7f73744138d77159955dbda82