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pro vyhledávání: '"Zuppella, Paola"'
Damage of multilayer optics with varying capping layers induced by focused extreme ultraviolet beam.
Autor:
Jody Corso, Alain, Zuppella, Paola, Barkusky, Frank, Mann, Klaus, Müller, Matthias, Nicolosi, Piergiorgio, Nardello, Marco, Guglielmina Pelizzo, Maria
Publikováno v:
Journal of Applied Physics; May2013, Vol. 113 Issue 20, p203106, 6p, 1 Black and White Photograph, 2 Diagrams, 6 Charts, 6 Graphs