Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Chubin Ma"'
Publikováno v:
2010 Symposium on Photonics and Optoelectronics.
Prepared a-SiC thin films with plasma enhanced chemical vapor deposition (PECVD) at low temperature (135 ℃), by using CH4, H2, SiH4 and B2H6. And with Raman spectroscopy, ellipsometry, absorption spectroscopy and other equipment to demonstrate the