Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Alex Paterson"'
Autor:
Edward P. Hammond, Edward V. Barnat, John Holland, Paul A. Miller, Theodoros Panagopoulos, Gregory A. Hebner, Alex Paterson
Publikováno v:
Plasma Sources Science and Technology. 16:330-336
The spatial structure and temporal evolution of the electric fields in a sheath formed in a dual frequency, 300 mm capacitive argon discharge are measured as functions of relative mixing between a low frequency current and a high frequency current. I
Publikováno v:
Plasma Sources Science and Technology. 15:879-888
Argon plasma characteristics in a dual-frequency, capacitively coupled, 300 mm-wafer plasma processing system were investigated for rf drive frequencies between 10 and 190 MHz. We report spatial and frequency dependent changes in plasma parameters su
Publikováno v:
Plasma Sources Science and Technology. 15:889-899
There is much interest in scaling rf-excited capacitively coupled plasma reactors to larger sizes and to higher frequencies. As the size approaches operating wavelength, concerns arise about non-uniformity across the work piece, particularly in light
Autor:
Gregory A. Hebner, Alex Paterson
Publikováno v:
Plasma Sources Science and Technology. 19:015020
Spatially resolved temperature, radial drift velocity and relative density of an argon ion metastable state were measured in a capacitively coupled, parallel-plate reactor. The argon plasma was generated using single-frequency excitation of 13, 60, 1
Publikováno v:
Plasma Sources Science and Technology. 17:045005
We examine the effects of an externally applied magnetic field (0–150 G) on an argon discharge generated capacitively at 13.56 MHz, in a Gaseous Electronics Conference reference cell. Dependence of the electrical characteristics of the discharge ar