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pro vyhledávání: '"550"'
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 4:794-798
In this paper, the results of an investigation of the Mo–polycide/Al–1% Si interface characteristics are reported. Mo–polycide was produced by sputtering a 0.3 μm MoSi2.2 film on 0.3 μm of phosphorus doped poly‐Si. The composite layer was r
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 7:1187-1193
Epitaxial TiN films were grown on (100), (110), and (111) oriented MgO by reactive magnetron sputtering from a Ti target in both mixed Ar/N2 and pure N2 discharges. An applied negative substrate bias Vs (0≤Vs≤600 V) was used to vary the flux and
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 4:500-503
Cross‐sectional transmission electron microscopy (X‐TEM) has been used to investigate the microstructure of TiN films deposited by reactive magnetron sputtering onto ASP 30 high speed steel (HSS) substrates. ASP 30 is a multiphase material consis
Publikováno v:
So, F, Kolawa, E, Kattelus, H, Zhao, X-A, Nicolet, M & Lien, C-D 1986, ' Thermal stability and nitrogen redistribution in the 〈Si〉/Ti/W–N/Al metallization scheme ', Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, vol. 4, no. 6, pp. 3078-3081 . https://doi.org/10.1116/1.573631
Backscattering spectrometry, Auger electron spectroscopy, and x‐ray diffraction have been used to monitor the thin‐film reactions and nitrogen redistribution in the 〈Si〉/Ti/W–N/Al metallization system. It is found that nitrogen in the W–N
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 26:688-691
The formation and morphological evolution of the germanides formed in the Ni1−xTax/Ge (x=0 and 0.1) systems were examined using ex situ and in situ annealing experiments. It was observed that the Ni-germanide in the Ni0.9Ta0.1/Ge system remained st
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 20:605-611
We prepared (Ti1−xAlx)N thin films by dc reactive sputtering using alloy targets and investigated their oxidation properties. The oxidation rate of the (Ti1−xAlx)N film decreases with increasing aluminum content because Al2O3, with a low oxygen d
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 35:031503
High-power impulse magnetron sputtering with a pulsed O2 flow control was used for reactive deposition of densified stoichiometric ZrO2 films with gradient ZrOx interlayers onto floating Si and steel substrates at low substrate temperatures (less tha
Autor:
Yasuhiro Matsumoto, A. Maldonado, Rene Asomoza, M. Meléndez-Lira, Dwight Acosta, M. de la L. Olvera
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 19:2097-2101
The influence of chromium doping on the physical properties of ZnO thin films, deposited by the chemical spray technique, is presented. In particular, we have studied the chemical stability of ZnO:Cr as a function of chromium concentration on the sta
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 19:2514-2521
The electrical, optical, and various mechanical properties of rf sputtered indium tin oxide layers were investigated in terms of electrical resistivity (four-probe measurement and Hall), optical transparency, scanning transmission electron spectrosco
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 16:1139-1144
A compact non-evaporable getter (NEG) pump is made by stacking sintered titanium–vanadium blades recently available from SAES Getters as St185. The 50 blades are stacked between copper spacers on a stainless steel tube, and are activated by a remov