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Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 19:2514-2521
The electrical, optical, and various mechanical properties of rf sputtered indium tin oxide layers were investigated in terms of electrical resistivity (four-probe measurement and Hall), optical transparency, scanning transmission electron spectrosco
Autor:
Michel Bayard, Sudhakar Kulkarni
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 9:1193-1196
High density ITO (indium–tin oxide) targets doped with Al2O3 and SiO2 manufactured in the Tektronix Ceramics Division have been used to rf sputter ITO films of various thicknesses on borosilicate glass substrates. Sputtering in an oxygen–argon ga