Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Ching-Yi Lin"'
Publikováno v:
Volume 3: Advanced Fabrication and Manufacturing; Emerging Technology Frontiers; Energy, Health and Water- Applications of Nano-, Micro- and Mini-Scale Devices; MEMS and NEMS; Technology Update Talks; Thermal Management Using Micro Channels, Jets, Sprays.
A key component of the MEMS cryogenic cooling systems we are developing is a MEMS compressor. Its function is to compress the refrigerants used in the cooling cycle. Layers of polyimide are stacked and patterned on a silicon wafer to create micro che
Publikováno v:
Journal of Electronic Packaging; Mar2017, Vol. 139 Issue 1, p011003-1-011003-10, 10p