Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Pengzhan Li"'
Publikováno v:
Sensors, Vol 23, Iss 19, p 8226 (2023)
To address the challenges in real-time process diagnosis within the semiconductor manufacturing industry, this paper presents a novel machine learning approach for analyzing the time-varying 10th harmonics during the deposition of low-k oxide (SiOF)
Externí odkaz:
https://doaj.org/article/b5591127c6f2485cbaf05d77c3737d93
Publikováno v:
Sensors, Vol 23, Iss 12, p 5563 (2023)
This study identified time-varying harmonic characteristics in a high-density plasma (HDP) chemical vapor deposition (CVD) chamber by depositing low-k oxide (SiOF). The characteristics of harmonics are caused by the nonlinear Lorentz force and the no
Externí odkaz:
https://doaj.org/article/68c9a5e86b2d4bfaaa562e2eee65d86c