Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Haroon Ahmed"'
Publikováno v:
Review of Scientific Instruments. 56:1257-1261
An isothermal processing system using a 2‐kW electron beam is described. Processing of areas up to 4×4 in. is achieved by rapidly scanning the beam in the multiple scan mode. An analysis of this method and some typical heating cycles for silicon w