Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Yoshihiro Hirai"'
Autor:
Masaomi Sanekata, Hiroshi Nishida, Yuki Nakagomi, Yoshihiro Hirai, Nobuo Nishimiya, Masahide Tona, Naoyuki Hirata, Hiroaki Yamamoto, Keizo Tsukamoto, Keijiro Ohshimo, Fuminori Misaizu, Kiyokazu Fuke
Publikováno v:
Plasma, Vol 4, Iss 2, Pp 269-280 (2021)
Modulated pulsed power magnetron sputtering (MPPMS) of titanium was investigated as a function of argon gas pressure using optical emission spectroscopy (OES). Delays in discharge and the formation of comb-like discharge current waveforms due to spli
Externí odkaz:
https://doaj.org/article/b5cbf561037741a7bb446be8e38242fe
Autor:
Masaomi Sanekata, Hiroshi Nishida, Tatsuya Watabe, Yuki Nakagomi, Yoshihiro Hirai, Nobuo Nishimiya, Masahide Tona, Hiroaki Yamamoto, Naoyuki Hirata, Keizo Tsukamoto, Keijiro Ohshimo, Fuminori Misaizu, Kiyokazu Fuke
Publikováno v:
Plasma, Vol 4, Iss 2, Pp 239-251 (2021)
Delayed discharges due to electrical breakdown are observed in modulated pulsed pow er magnetron sputtering (MPPMS) plasma of titanium. The delayed discharge, which is remarkable with decreasing argon gas pressure, transforms the discharge current wa
Externí odkaz:
https://doaj.org/article/426670b55daa4f9387831410d852f104
Autor:
Yoshihiro Hirai, Naoyuki Hirata, Nobuo Nishimiya, Kiyokazu Fuke, Yuki Nakagomi, Hiroshi Nishida, Masaomi Sanekata, Tatsuya Watabe, Fuminori Misaizu, Masahide Tona, Keijiro Ohshimo, Hiroaki Yamamoto, Keizo Tsukamoto
Publikováno v:
Plasma, Vol 4, Iss 16, Pp 239-251 (2021)
Plasma
Volume 4
Issue 2
Pages 16-251
Plasma
Volume 4
Issue 2
Pages 16-251
Delayed discharges due to electrical breakdown are observed in modulated pulsed pow er magnetron sputtering (MPPMS) plasma of titanium. The delayed discharge, which is remarkable with decreasing argon gas pressure, transforms the discharge current wa
Autor:
Hiroshi Nishida, Masaomi Sanekata, Nobuo Nishimiya, Keijiro Ohshimo, Yuki Nakagomi, Hiroaki Yamamoto, Naoyuki Hirata, Masahide Tona, Kiyokazu Fuke, Keizo Tsukamoto, Yoshihiro Hirai, Fuminori Misaizu
Publikováno v:
Plasma
Volume 4
Issue 2
Pages 18-280
Plasma, Vol 4, Iss 18, Pp 269-280 (2021)
Volume 4
Issue 2
Pages 18-280
Plasma, Vol 4, Iss 18, Pp 269-280 (2021)
Modulated pulsed power magnetron sputtering (MPPMS) of titanium was investigated as a function of argon gas pressure using optical emission spectroscopy (OES). Delays in discharge and the formation of comb-like discharge current waveforms due to spli