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Autor:
Jeong Ho Cho, Yongsuk Choi, Sun Jin Yun, Jung Wook Lim, Kwang Hoon Jung, Yong-Duck Chung, Dae-Hyung Cho, Hyun Jun Chai, Gayoung Kim
Publikováno v:
Nanoscale. 10:15213-15221
This work reports a breakthrough technique for achieving high quality and uniform molybdenum dichalcogenide (MoX2 where X = S, Se) films on large-area wafers via metal-agglomeration-suppressed growth (MASG) with small chalcogen (X-) molecules at grow