Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Chael, A."'
Autor:
Chung, Gwiy-Sang, Kim, Chael-Han
Publikováno v:
In Microelectronics Journal December 2008 39(12):1560-1563
Autor:
Gwiy-Sang Chung, Chael-Han Kim
Publikováno v:
Microelectronics Journal. 39:1560-1563
The physical and electrical characteristics of MgO (medium layer) and Pt (sensor material) thin films deposited by a reactive RF sputtering method and a magnetron sputtering method, respectively, were analyzed as a function of the annealing temperatu