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Autor:
Gwiy-Sang Chung, Chael-Han Kim
Publikováno v:
Microelectronics Journal. 39:1560-1563
The physical and electrical characteristics of MgO (medium layer) and Pt (sensor material) thin films deposited by a reactive RF sputtering method and a magnetron sputtering method, respectively, were analyzed as a function of the annealing temperatu