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pro vyhledávání: '"550"'
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 28:99-107
A multilayer high reflectance coating consisting of Ag, SiO2, and TiO2 with Rvis of 99.3% was successfully designed by simulation based on Maxwell’s equations. The authors found that providing the low refractive index SiO2 layer with non-quarter-wa
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 26:688-691
The formation and morphological evolution of the germanides formed in the Ni1−xTax/Ge (x=0 and 0.1) systems were examined using ex situ and in situ annealing experiments. It was observed that the Ni-germanide in the Ni0.9Ta0.1/Ge system remained st
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 21:1210-1217
A gate stack structure consisting of a polycrystalline silicon germanium (poly-SiGe) conductor and a HfO2 dielectric on a silicon substrate was formed by inductively coupled plasma etching using HBr/Cl2/O2. Etch rates of poly-SiGe with 46% Ge were 1.
Autor:
W. C. Goh, G. S. Chen, Andrew T. S. Wee, C. K. Ong, R. Liu, Cheng Hon Alfred Huan, Sun Tee Tay
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 20:125-131
Ferroelectric SrBi2(Ta1−xNbx)2O9 (SBNT) thin films were deposited on Pt/TiOx/SiO2/Si substrates at various substrate temperatures by the pulsed laser ablation deposition method. X-ray diffraction shows that the film has a fluorite structure at a su
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 16:1139-1144
A compact non-evaporable getter (NEG) pump is made by stacking sintered titanium–vanadium blades recently available from SAES Getters as St185. The 50 blades are stacked between copper spacers on a stainless steel tube, and are activated by a remov
Autor:
M. K. Lei, Z. L. Zhang
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 16:524-529
Plasma source ion carburizing is a low-temperature, low-pressure carburizing approach for improved wear resistance of steel with specific advantages over plasma carburizing and plasma source carbon ion implantation. A carburizing apparatus based on a
Autor:
Ching-Song Shern, Jyh-Shen Tsay
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 14:2522-2526
Low‐energy electron diffraction (LEED), Auger electron spectroscopy and ultraviolet photoelectron spectroscopy (UPS) were used to study the annealing effect of the silver ultrathin film on a Pt(111) surface. The intensities of the specular beam of
Autor:
M. K. Lei, Z. L. Zhang
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 13:2986-2990
Plasma source ion nitriding is a new approach for surface modification of steel with certain advantages over conventional plasma nitriding and plasma‐based nitrogen ion implantation. A nitriding apparatus based on an electron cyclotron resonance (E
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 11:1406-1410
Two ionized cluster beam (ICB) sources were used to deposit PbTiO3 films 300 nm thick onto Pt‐metallized, oxidized Si wafers 100 mm in diameter. Pb was deposited from one ICB source and Ti from the other. The deposition was carried out in a mixture
Autor:
R. A. Langley
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 10:1185-1187
A technique has been developed for making aluminum wire seal gaskets of various sizes and shapes for use with both stainless steel and aluminum alloy flanges. The gasket material used is 0.9999 pure aluminum, drawn to a diameter of 3 mm. This materia