Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Tadahiro Ohmi"'
Autor:
Takenao Nemoto, Xun Gu, Shigetoshi Sugawa, Yugo Tomita, Akinobu Teramoto, Tadahiro Ohmi, Rihito Kuroda
Publikováno v:
Journal of The Electrochemical Society. 159:H407-H411
Publikováno v:
Journal of The Electrochemical Society. 158:H1145
Autor:
Masayuki Saeki, Fumikazu Mizutani, Yasuhiro Kawase, Yasuyuki Shirai, Masafumi Kitano, Tadahiro Ohmi
Publikováno v:
Journal of The Electrochemical Society. 154:C530
Aluminum alloys are key materials for advanced large-scale integration (LSI)/flat panel display (FPD) plasma process equipment to drastically improve the process performance. There exists a severe disadvantage for aluminum-alloy process chambers, how