Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Alfred Ludwig"'
Publikováno v:
Journal of Microelectromechanical Systems. 20:21-27
This paper reports on a novel miniaturized deposition technique based on micro-hotplates which are used as microevaporation sources (MES) for a localized deposition of thin films and nanoparticles. The feasibility of this small-scale deposition techn
Publikováno v:
Journal of Microelectromechanical Systems. 19:1264-1269
Two microfabricated devices designed as test platforms for the investigation of scaling effects in micro- to nanosized substrate-attached shape-memory alloy (SMA) thin films as well as freestanding (suspended) thin-film microbridges are presented. Th
Autor:
Robert Meyer, S. Hamann, Klaus Hackl, Martin R. Hofmann, Nektarios Koukourakis, Alfred Ludwig, E Darakis, Yiu Wai Lai, M Ehmann, Nils C. Gerhardt
Publikováno v:
Journal of Microelectromechanical Systems. 19:1175-1179
An investigation on the integrity of micro-hotplates using in situ digital holographic microscopy is reported. The surface topography and surface evolution of the devices during high-temperature operation (heating/cooling cycles) is measured with nan
Publikováno v:
Journal of Microelectromechanical Systems. 18:186-194
Bistable shape memory actuators were fabricated by microsystem technology processes and characterized with regard to their use in tactile graphic displays. The actuators were realized as sputter-deposited buckled metallic thin-film carriers, having s
Autor:
Takahiko Oki, Gilbert Reyne, Alfred Ludwig, Hideo Muro, Eckhard Quandt, Akira Asaoka, Tarik Bourouina, Hiroyuki Fujita, Eric Lebrasseur, Alexis Debray
Publikováno v:
Journal of Microelectromechanical Systems. 11:355-361
A novel two-dimensional (2-D) optical-scanner device is presented. This device incorporates a highly magnetostrictive thin film with anisotropic properties, so that it can produce 2-D-actuation corresponding to bending and torsion vibrations. The mag