Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Chris Merritt"'
Publikováno v:
Journal of Applied Physics. 88:5751-5755
A model, based on surface energy minimization under nonequilibrium conditions, is presented to describe the evolution of the amorphous silicon (a-Si) topography near the hemispherical grained silicon. The evolution of the depletion area can be explai