Zobrazeno 71 - 80
of 178
pro vyhledávání: '"Komuro, A."'
Publikováno v:
Japanese Journal of Applied Physics. 33:4691
Laser removal of fingerprints from glass and quartz surfaces was studied using laser irradiation in air. The KrF excimer laser, continuous wave (CW) CO2 laser and pulsed CO2 laser were used in the investigation. Electron probe microanalysis (EPMA) wa
Publikováno v:
Japanese Journal of Applied Physics. 33:3902
Structural, magnetic and magnetooptical properties of nonstoichiometric Bi-substituted yttrium iron garnet (Bi-YIG) films have been studied in terms of Fe concentration. The garnet films were prepared by rf sputtering using targets which had various
Autor:
Satoshi Haraichi, Masanori Komuro
Publikováno v:
Japanese Journal of Applied Physics. 32:6168
The characteristics of ion-beam-assisted etching (IBAE) of Si with Cl2 have been investigated using a broad-pulsed Ga ion beam, with several parameters such as Cl2 gas flux, ion beam dwell time, sample temperature, and beam diameter. A simple adsorpt
Autor:
Shunji Misawa, Yoshinobu Sugiyama, Toshimi Wada, Masanori Komuro, Shingo Ichimura, Toshihiko Kanayama
Publikováno v:
Japanese Journal of Applied Physics. 32:6262
This paper describes how the two-dimensional electron gases in AlGaAs/GaAs heterostructures are degraded by low-energy electron irradiation. Both the electron mobility and the two-dimensional carriers are shown to decrease considerably by a 1×1017/c
Autor:
Hiroshi Hiroshima, Masanori Komuro
Publikováno v:
Japanese Journal of Applied Physics. 32:6153
Characteristics of thermally grown SiO2, which is a candidate for high-resolution electron beam resists, are studied. In order to improve the selectivity (the etch rate ratio of electron-irradiated area to unirradiated area) which defines the profile
Publikováno v:
Japanese Journal of Applied Physics. 31:4492
Focusing characteristics of an ion beam from a He field ion source were investigated. For a W emitter as installed, a beam with an ion current of 0.7 pA was focused into 0.2 µm because the angular current density did not exceed 0.02 µA/sr. Improvem
Autor:
Nobuyoshi Koshida, Nobufumi Atoda, Kinju Endo, Kazuyoshi Yoshida, Masanori Komuro, Shinichi Watanuki
Publikováno v:
Japanese Journal of Applied Physics. 31:4483
Nanometer-width refractory metal lines are generated on Si substrates with high resolution by focused ion beam (FIB) exposure to MoO3 and WO3 inorganic resists, development and subsequent reduction in dry H2 gas. On the basis of some experiments for
Autor:
Yoshinobu Aoyagi, Patrick O'keeffe, Masashi Ishii, Shuji Komuro, Takitaro Morikawa, Shoji Den, Yasufumi Iimura, Ciaran O'morain, Takashi Meguro
Publikováno v:
Japanese Journal of Applied Physics. 31:3301
Hydrogen plasma beam irradiation effects on the surface reconstruction of GaAs substrates are investigated. Successful low temperature removal of the GaAs oxide layer using hydrogen plasma beam irradiation is carried out, and the subsequent reflectio
Publikováno v:
Japanese Journal of Applied Physics. 31:L531
Zinc selenide crystals are grown from the melt by a modified Bridgman method under argon pressure. A specific Zn partial pressure over the melt is maintained during growth by heating Zn in a reservoir. Grown crystals are annealed in situ in a crucibl
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