Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Ashwin A. Seshia"'
Autor:
Milind Pandit, Chun Zhao, Hemin Zhang, Jiangkun Sun, Guillermo Sobreviela, Dongyang Chen, Ashwin A. Seshia
Publikováno v:
IEEE Electron Device Letters. 41:1560-1563
An ultra-sensitive mode-localized accelerometer is reported in this letter. In order to lower the coupling factor of the coupled resonators thus improving the parametric amplitude ratio sensitivity, a stiff anchor support is employed as a mechanical
Publikováno v:
IEEE Electron Device Letters. 29:701-703
A timing reference incorporating a single-crystal-silicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acousti