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pro vyhledávání: '"Vora, K"'
Publikováno v:
EPJ Web of Conferences, Vol 91, p 00008 (2015)
Amorphous silicon oxynitride (SiOxNy) possess interesting optical and mechanical properties. Here, we present direct evidence for the formation of ion tracks in 1 µm thick silicon oxynitride of different stoichiometries. The tracks were created by i
Externí odkaz:
https://doaj.org/article/586bfa9d2f5d408ebf078c38ca0abbef