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Publikováno v:
Applied Surface Science. 528:146951
Two-dimensional (2D) transition metal dichalcogenides (TMDCs) have demonstrated superior electrical and optical characteristics and are expected to replace silicon in semiconductor materials. However, in practice the use of TMDCs remains a challenge
Publikováno v:
Applied Surface Science. 279:41-45
The investigations of stainless steel (SS) etching behavior in the Cl 2 /Ar inductively coupled plasma as well as the etched surface characteristics were carried out. It was found that an increase in Ar fraction in the Cl 2 /Ar plasma from 0 to 100%
Autor:
Sun Jin Yun, Yong Shin Kim
Publikováno v:
Applied Surface Science. 229:105-111
Polycrystalline ZnS thin films were grown by the atomic layer deposition (ALD) using the precursors of diethyl zinc and hydrogen sulfide in the substrate temperature range of 250–400 °C. The most uniform ALD growth was observed at 300 °C with the
Autor:
S. Dey, Sun Jin Yun
Publikováno v:
Applied Surface Science. 143:191-200
Polycrystalline CaS thin films were grown on Al 2 O 3 films deposited on Si-wafer using the atomic layer deposition (ALD) technique. The surface structure of these films was studied by AFM and compared with respective SEM images. The polycrystalline