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Publikováno v:
APPLIED PHYSICS LETTERS. 80(16):2880-2882
Highly stressed and strongly adhered nanocrystalline diamond films are grown on Si substrates by providing controlled and continuous bias current density (BCD) in microwave plasma chemical vapor deposition system. The stress and hence the curvature o
Publikováno v:
Applied physics letters. 87:211901-211901-3
Nanoindentation tests were performed on a ductile-machined silicon wafer with a Berkovich diamond indenter, and the resulting indents were examined with a transmission electron microscope. It was found that the machining-induced subsurface amorphous
Autor:
Jun'ichi Tamaki, Xiaohui Gai, John A. Patten, Hirokazu Takahashi, Jiwang Yan, Hirofumi Harada
Publikováno v:
Applied Physics Letters. 86(18):181913-181913-3
Nanoindentation tests were performed on ultraprecision diamond-turned silicon wafers and the results were compared with those of pristine silicon wafers. Remarkable differences were found between the two kinds of test results in terms of load-displac