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Publikováno v:
Applied Optics
Applied optics
Applied optics, Optical Society of America, 2020, 59 (4), pp.910. ⟨10.1364/AO.378122⟩
Applied optics
Applied optics, Optical Society of America, 2020, 59 (4), pp.910. ⟨10.1364/AO.378122⟩
International audience; A method of optimizing and manufacturing a diffractive blazed grating array (DBA) is proposed to create a visual security feature when illuminated by a divergent Light emitting diode (LED) source. A pure phase grating array se
Publikováno v:
Applied Optics, 59(20)
The development of actinic mask metrology tools represents one of the major challenges to be addressed on the roadmap of extreme ultraviolet (EUV) lithography. Technological advancements in EUV lithography result in the possibility to print increasin