Zobrazeno 1 - 10
of 115
pro vyhledávání: '"A. Vinogradov"'
Autor:
Vinogradov, D. V., Zubkova, T. V.
Publikováno v:
AIP Conference Proceedings; 2023, Vol. 3011 Issue 1, p1-6, 6p
Autor:
Vinogradov, Yu.I.
Publikováno v:
AIP Conference Proceedings; 2023, Vol. 2549 Issue 1, p1-9, 9p
Publikováno v:
AIP Conference Proceedings; 2023, Vol. 2476 Issue 1, p1-7, 7p
Autor:
Samoilova, E. M., Babenko, M. G., Vinogradov, M. V., Nasad, T. G., Yankin, I. N., Davidenko, O. Yu., Bokova, L. G., Malinin, P. V.
Publikováno v:
AIP Conference Proceedings; 2023, Vol. 2700 Issue 1, p1-4, 4p
Publikováno v:
AIP Conference Proceedings; 11/1/2022, Vol. 2647 Issue 1, p1-4, 4p
Publikováno v:
AIP Conference Proceedings; 2022, Vol. 2383/2470 Issue 1, p1-7, 7p
Publikováno v:
AIP Conference Proceedings; 2022, Vol. 2383/2470 Issue 1, p1-7, 7p
Autor:
M. L. Vinogradov, D. K. Kostrin
Publikováno v:
AIP Conference Proceedings.
This paper is devoted to the questions about the difference between mineral and synthetic vacuum oils, determining how often should the oil in the vacuum pump be changed, can the motor oil be poured into the vacuum pump and how to diagnose the pump b
Autor:
A. A. Kobelev, P. A. Pankratiev, A. S. Smirnov, Vladimir Volynets, A. Vinogradov, Yu. Barsukov
Publikováno v:
AIP Conference Proceedings.
This paper presents the experimental data about SiN and SiO2 etching by SF6/H2/Ar/He plasma discharge. It has been shown that SiN etch rate increases if add small amount of He (less than 5 sccm) into the discharge. The SiO2 etch rate does not depend
Publikováno v:
AIP Conference Proceedings; 2019, Vol. 2195 Issue 1, p020032-1-020032-6, 6p, 2 Diagrams, 1 Chart