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Autor:
Jan Philipp Kollender, Achim Walter Hassel, Cezarina Cela Mardare, Saeedeh Ravandi, Alexey Minenkov, Heiko Groiss, Andrei Ionut Mardare
Publikováno v:
ACS Applied Materials & Interfaces
Wide range binary and ternary thin film combinatorial libraries mixing Al, Cu, and Ga were screened for identifying alloys with enhanced ability to withstand electromigration. Bidimensional test wires were obtained by lithographically patterning the