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Autor:
Oussama Moutanabbir, Jörg Schilling, Matthias Petzold, Falk Naumann, Manfred Reiche, Clemens Schriever
Publikováno v:
2010 11th International Thermal, Mechanical & Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems (EuroSimE).
The physical properties of materials can be manipulated by applying stress or strain. For instance, the controlled introduction of strain in silicon (Si) devices was found to increase the charge careers mobility and modify the Si optical properties.