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pro vyhledávání: '"Ashwin A. Seshia"'
Autor:
Joshua E.-Y. Lee, Ashwin A. Seshia
Publikováno v:
2008 IEEE Sensors.
We report on the experimental characterization of a single crystal silicon square-plate microresonator. The resonator is excited in the square wine glass (SWG) mode at a mechanical resonance frequency of 2.065 MHz. The resonator displays quality fact
Publikováno v:
2008 IEEE Sensors.
This paper reports a single-crystal silicon mass sensor based on a square-plate resonant structure excited in the wine glass bulk acoustic mode at a resonant frequency of 2.065 MHz and an impressive quality factor of 4 million at 12 mtorr pressure. M