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pro vyhledávání: '"Maslar, James E."'
Autor:
Sperling BA; Material Measurement Laboratory, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899, USA., Maslar JE; Material Measurement Laboratory, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899, USA.
Publikováno v:
Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B [J Vac Sci Technol B Nanotechnol Microelectron] 2019; Vol. 37 (6).